Application of photoelastic microscopy for researches in MEMS technology and photonics (a)

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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O. Oliinyk, B. Tsyganok, B. Serdega, I. Matiash // Abstractsproceedings of 35-th International Spring Seminar on Electronics Technology, 9 - 13 may, Bad Aussee, Austria, Р. 124-125 (2012)

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