Atomic scale observation of phase separation and formation of silicon clusters in Hf higk-k silicates

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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E. Talbot, M. Roussel, C. Genevois, P. Pareige, L. Khomenkova, X. Portier, F. Gourbilleau // J. Appl. Phys. - 2012.-V.111.-P. 103519 (5 pages).