Chemical composition and light emission properties of Si-rich-SiOx layers prepared by magnetron sputtering

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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L. Khomenkova, N. Korsunska, M. Sheinkman, T. Stara // Semiconductor Physics, Quantum Electronics and Optoelectronics.-2007.- V.10, №4. - P.21-25.