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Contactless interference 3D profilometer “Micron-alpha”

We offer measurement services based on 3D profilometer “Micron-alpha”:

- rendering of two- and three-dimensional images of surface
- estimation of quantitatively relief characteristics
- measurements of the thickness of thin films
- carrying out the metallurgical study.

Purpose: for a surface microtopography research by the method of processing of the sequence of interference data at partly coherent illumination.

Main technical specification:

• scanning field (X,Y), µm……..……100 ÷ 300
• horizontal resolution (X,Y), µm ………...0,15
• maximum measured height (Z), µm ……...40
• vertical resolution (Z), nm …………….……5
• scanning time, min……………..….........0,1-1

The device gives a possibility:

• to render two- and three-dimensional images of surface,
• to estimate quantitatively relief characteristics,
• to measure the thickness of thin films,
• to carry out metallurgical study.

2D and 3D relief of the object- micrometer.

Contacts: Ukraine, V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine, E. Svezhentsova (e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it. )