Silicon chip with integrated thermocontrol system as a base for gas microsensors

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Kukla A.L., Shirshov Yu.M. // Proc. 5th NEXUSPAN Workshop on Thermal aspects in microsystem technology. – Budapest (Hungary). – 1998. - p. 14-17