Аutomated method for determining the etch pits density on crystallographic planes of large semiconductor crystals.

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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G.S.Pekar, А.А.Singaevsky А.F.Singaevsky // Semiconductor physics, quantum electronics and optoelectronics. 2016. V.19, N.1. P. 023-027.