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N.I. Klyui, V.Ya. Bratus, V.P. Temchenko, V.B. Lozinskii, V.O. Yukhymchuk, WeiHan, BingbingLiu.. Materials Science in Semiconductor Processing 71 (2017) 232-239
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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
N.I. Klyui, V.Ya. Bratus, V.P. Temchenko, V.B. Lozinskii, V.O. Yukhymchuk, WeiHan, BingbingLiu.. Materials Science in Semiconductor Processing 71 (2017) 232-239